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Semi Interface Magazine
Semi Interface Magazine

Material Engineering and Interface Optimisation

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PlasmaPro ASP
PlasmaPro ASP

High-rate biased plasma ALD with low damage for R&D

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Oxford Instruments Plasma Technology is a leading provider of etch & deposition processing equipment & solutions.


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Plasma technology is used in the fabrication of most semiconductor devices created today across a wide range of industries. It is able to provide unique solutions for the creation and manipulation of matter with atomic-scale accuracy.

POWER DEVICES
Process solutions for efficient power devices including SiC and GaN technologies, enabling the next wave of leading-edge applications.
POWER DEVICES
VCSELs / LASERS
Solutions for reliable, high-volume manufacturing of VCSELs and EELS for applications including LiDAR and optoelectronics.
VCSELs / LASERS
RF DEVICES
Solutions for wide band gap devices for modern device technologies, including GaN HEMTs and electric vehicle technology.
RF DEVICES
2D MATERIALS
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WORLD-LEADING SYSTEMS

High-performance, reliable and flexible systems across several etching & deposition technologies. Systems range from single load-lock R&D systems to full clusterable production systems for high volume manufacturing.

High etch rates. High selectivity. Low damage processing. Excellent profile control. Independently-controlled substrate DC bias.

ICP ETCHING

ICP ETCHING SYSTEMS >>

Simple and economical solution for plasma etching, chemical etching and ion-induced etching with applications including failure analysis.

RIE

RIE SYSTEMS >>

Well-established technique for a wide variety of films, high-quality passivation and high density masks.

PECVD

PECVD SYSTEMS >>

Unique range of flexibility and capability in the engineering of nanoscale structure, GaN HEMT and RF devices with clusterable options available.

ALD

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Latest News & Events

Jun 20, 2025
Oxford Instruments and Eindhoven University…

Oxford Instruments and Eindhoven University of Technology (TU/e) announcement of the signing of a Memorandum of Understanding…

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Jan 22, 2024
Significant investment into ALD technology…

Oxford Instruments supplies ALD technology for microLED to key UK manufacturer for augmented reality and advanced consumer devices

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Nov 23, 2023
Significant orders of our GaN ALE and ALD…

Oxford Instruments Receives Orders for GaN ALE and ALD Systems from Several Key Japanese Power Electronics and RF Foundries

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Sep
2
nanoFabUK Symposium 2025
Location: Glasgow University Union, UK
Businesses Attending:
Plasma Technology, NanoAnalysis
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Sep
10
Seeing is Acheiving at Princeton
Location: Princeton University
Businesses Attending:
Andor, Asylum Research, NanoAnalysis, Plasma Technology, WITec | Raman
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